Sputtering on glass or silicon requires high quality standards. Even small fluctuations in thickness of the deposited layers can influence the layer properties considerably. Float glass for window and façade constructions can be subject to certain changes in color and transmission properties. Changes in the thickness of coatings of glass as a basis for solar cell production, can lead to asymmetries of the electrical properties.

Layer properties can be changed by the partial pressure of the sputtering gas or the magnetic field. Since changes in the gas composition affect the layer composition likewise, for adjustments of the layer thickness solely the control and modification of the magnetic field can be applied.

The m-cat system characterizes tubular magnetrons with high precision, what allows the operator to control the magnetic components in sputtering units. Besides the exact measurement and analysis of the magnet configurations the m-cat provides help for adjustable magnetrons, regardless of the manufacturer. To ensure high reliability the magnetrons’ geometries (deflection) are determined.

• Acquisition of the complete magnetic field contour
• Systems for round cathodes as well as flat cathode magnetrons available
• Implementation of the system in an already existing manufacturing process possible
• Trimming aid function for trimmable magnetrons
• High usability