m-cat magnet bar measuring system

Rotating magnetrons and adjustable magnet bars can be measured and analyzed exactly within the sputtering process for float glass coating. Defective magnetrons and magnet bars are identified early and reliably. The homogeneity of the layer thickness can be increased and a sputtering-through can be avoided.



Sputtering on glass or silicon requires high quality standards. Even small fluctuations in thickness of the deposited layers can influence the layer properties considerably. Float glass for window and façade constructions can be subject to certain changes in color and transmission properties. Changes in the thickness of coatings of glass as a basis for solar cell production, can lead to asymmetries of the electrical properties.

Layer properties can be changed by the partial pressure of the sputtering gas or the magnetic field. Since changes in the gas composition affect the layer composition likewise, for adjustments of the layer thickness solely the control and modification of the magnetic field can be applied.

The m-cat system characterizes tubular magnetrons with high precision, what allows the operator to control the magnetic components in sputtering units. Besides the exact measurement and analysis of the magnet configurations the m-cat provides help for adjustable magnetrons, regardless of the manufacturer. To ensure high reliability the magnetrons’ geometries (deflection) are determined.

Product video

m-cat measuring unit
m-cat measuring unit

With the use of m-cat you increase

  • the process reliability, as new magnetrons can be subjected to an incoming inspection and defective magnetrons are detected earlier and more reliably.
  • the homogeneity of the layer thickness, as adjustable magnetrons can be set in a controlled manner, or suitable magnetrons can be combined more easily.
  • the lifetime of targets, as sputtering of the cost-intensive targets can be avoided.


  • Acquisition of the complete magnetic field contour
  • Systems for round cathodes as well as flat cathode magnetrons available
  • Implementation of the system in an already existing manufacturing process possible
  • Trimming aid function for trimmable magnetrons
  • High usability


Technical information & specifications:

• Complete measurement within 1 minute
• Graphical representation of the course of the field
• Detection of the minimum and maximum magnetic field strength
• Storage and export function of individual measurement series in CSV format
• Target parameters (diameter, deflection) can be recorded
• Trimming aid function for trimmable magnetrons
• Length from 0.4 - 4.0m
• Magnetic field configuration: 33 channels (X, Y, Z) +/- 1%
• Geometry of the magnetron (position of the magnetic functional part): +/- 0.1mm
• Geometry of the target (diameter, deflection): +/- 0.1mm
• Software with life cycle management, various views and setting options


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